X-ray lithography and X-ray microscopy using a laser-produced plasma.

Droplet-target laser-plasma source for proximity x-ray lithography

A compact, high-brightness and practically debris-free laser-plasma soft x-ray source for proximity x-ray lithography is described. The target of the source is small liquid fluorocarbon droplets injected into vacuum with a piezoelectrically vibrated nozzle. Emission from heliumand hydrogenlike fluorine in the 1.2–1.7 nm wavelength range was determined to ;2310 photons/~sr-pulse!, which correspo...

Brilliance Improvement of a Laser-Produced Soft X-Ray Plasma

The brilliance of a laser-produced soft X-ray source is enhanced for gaseous target concepts. In contrast to solid or liquid target materials, these sources are clean and versatile but provide a comparably low conversion efficiency of laser energy into EUV and soft X-ray radiation. The basic idea is to induce supersonic effects in the gas jet, leading to a local increase of the particle density...

X-ray Emission Spectra from Laser-produced Cobalt Plasma

Enhancement of X-Ray Emission from Laser Irradiated Metals for High-Contrast X-ray Microscopy: The Effect of Initial Target Density

This article has no abstract.

2. Microfabrication Using X- ray Lithography